Active vibration isolation system providing control by means of electro-pneumatic in either 3 or 6 Degrees Of Freedom.

• Optimal active vibration isolation performance without any amplification at resonance.

• Excellent level accuracy (+ 10 microns) in both the vertical and horizontal plane.

• Minimal deflection and settling time after an acceleration or deceleration of a moving mass within the machine, shorter settling times equals greater machine throughput.

• Very efficient real time control.

• PLC, CAN-Bus, one Controller and one High Speed electro-pneumatic servo valve for each degree of freedom.

• Each Controller consists of a microprocessor & integrated, high resolution sensors for position, air pressure & acceleration.

• Easy-to-use, intelligent WinSNI-Software for setting up & optimizing the Active vibration isolation system AIS™ and for providing system diagnostics.

• Two different modes of operation can be selected by simply using a digital I/O. Scanning mode (during sensitive machine operations) and loading mode (during moving mass within the machine).

• Feed forward signal is not required from the machine controller simplifying setup.

• No disturbing heat generation, magnetic variations or high electrical power consumption as by electromagnetic actuators and linear motors.